| 000 | 00826nam a2200241 a 4500 | ||
|---|---|---|---|
| 001 | vtls000067287 | ||
| 003 | KUKTEM | ||
| 005 | 20251125093404.0 | ||
| 008 | 121203t2014 nyua f 001 0 eng d | ||
| 020 | _a9780815515937 | ||
| 039 | 9 |
_a201408211503 _bsaini _y201212031120 _zida |
|
| 040 | _aUMP | ||
| 090 | _aTK7874 .S27 2014 | ||
| 100 | 1 | _aSarkar, Jaydeep | |
| 245 | 1 | 0 |
_aSputtering materials for VLSI and thin film devices / _cJaydeep Sarkar |
| 260 |
_aNorwich, N.Y. : _bWilliam Andrew, _c2014 |
||
| 300 |
_ax, 603 p. : _bill. ; _c24 cm. |
||
| 504 | _aIncludes bibliographical references and index | ||
| 650 | 0 |
_aFlat panel displays _xMaterials |
|
| 650 | 0 |
_aMicroelectronics _xMaterials |
|
| 650 | 0 | _aSputtering (Physics) | |
| 999 |
_aVIRTUA40 _c64262 _d64268 |
||
| 999 | _aVTLSSORT0080*0200*0400*0900*1000*2450*2600*3000*5040*6500*6501*6502*9992 | ||