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008 120522t2002 paua f b 101 0 eng d
020 _a9781558996700
020 _a1558996702
039 9 _a201710021127
_bAUTHORITY
_c201212031253
_dfauzi
_c201212031104
_dfauzi
_y201205221235
_zsafura
040 _aUMP
090 _aTK7871.85 .A38 2002
111 2 _aAdvanced Metallization Conference
245 1 0 _aAdvanced Metallization Conference 2001 (AMC 2001) :
_bproceedings of the conference held October 8-11, 2001, in Montreal, Canada, sponsored by Continuing Education in Engineering, University Extension, University of California at Berkeley, California, U.S.A. A parallel session of the conference was held October 29-31 in Tokyo, Japan. /
_ceditors, Andrew J. McKerrow ... [et al]
246 3 0 _aAMC 2001
260 _aWarrendale, Pa. :
_bMaterials Research Society,
_cc2002
300 _axxii, 719 p. :
_bill. ;
_c24 cm.
490 1 _aMaterials Research Society conference proceedings,
_x1048-0854
504 _aIncludes bibliographical references and indexes
650 0 _aSemiconductors
_xDesign and construction
_vCongresses
650 0 _aIntegrated circuits
_xUltra large scale integration
_xMaterials
_vCongresses
650 0 _aIntegrated circuits
_xUltra large scale integration
_xDesign and construction
_vCongresses
650 0 _aThin films
_vCongresses
650 0 _aMetallic films
_vCongresses
650 0 _aMetallizing
_vCongresses
700 1 _aMcKerrow, Andrew J.
710 2 _aUniversity of California, Berkeley.
_bContinuing Education in Engineering
830 0 _aMaterials Research Society conference proceedings,
_x1048-0854
999 _aVIRTUA40
_c64415
_d64421
999 _aVTLSSORT0080*0200*0201*0400*0900*1110*2450*2460*2600*3000*4900*5040*6500*6501*6502*6503*6504*6505*7000*7100*8300*9992