| 000 | 01858nam a2200349 a 4500 | ||
|---|---|---|---|
| 001 | vtls000060000 | ||
| 003 | KUKTEM | ||
| 005 | 20251125093413.0 | ||
| 008 | 120522t2002 paua f b 101 0 eng d | ||
| 020 | _a9781558996700 | ||
| 020 | _a1558996702 | ||
| 039 | 9 |
_a201710021127 _bAUTHORITY _c201212031253 _dfauzi _c201212031104 _dfauzi _y201205221235 _zsafura |
|
| 040 | _aUMP | ||
| 090 | _aTK7871.85 .A38 2002 | ||
| 111 | 2 | _aAdvanced Metallization Conference | |
| 245 | 1 | 0 |
_aAdvanced Metallization Conference 2001 (AMC 2001) : _bproceedings of the conference held October 8-11, 2001, in Montreal, Canada, sponsored by Continuing Education in Engineering, University Extension, University of California at Berkeley, California, U.S.A. A parallel session of the conference was held October 29-31 in Tokyo, Japan. / _ceditors, Andrew J. McKerrow ... [et al] |
| 246 | 3 | 0 | _aAMC 2001 |
| 260 |
_aWarrendale, Pa. : _bMaterials Research Society, _cc2002 |
||
| 300 |
_axxii, 719 p. : _bill. ; _c24 cm. |
||
| 490 | 1 |
_aMaterials Research Society conference proceedings, _x1048-0854 |
|
| 504 | _aIncludes bibliographical references and indexes | ||
| 650 | 0 |
_aSemiconductors _xDesign and construction _vCongresses |
|
| 650 | 0 |
_aIntegrated circuits _xUltra large scale integration _xMaterials _vCongresses |
|
| 650 | 0 |
_aIntegrated circuits _xUltra large scale integration _xDesign and construction _vCongresses |
|
| 650 | 0 |
_aThin films _vCongresses |
|
| 650 | 0 |
_aMetallic films _vCongresses |
|
| 650 | 0 |
_aMetallizing _vCongresses |
|
| 700 | 1 | _aMcKerrow, Andrew J. | |
| 710 | 2 |
_aUniversity of California, Berkeley. _bContinuing Education in Engineering |
|
| 830 | 0 |
_aMaterials Research Society conference proceedings, _x1048-0854 |
|
| 999 |
_aVIRTUA40 _c64415 _d64421 |
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