000			01631nam a2200325 a 4500
001			vtls000060055
003			KUKTEM
005			20251125093413.0
008			120522t1994 paua f b 001 0 eng d
020			_a9781558992351
020			_a1558992359
039		9	_a201212031235 _bfauzi _y201205221559 _zsafura
040			_aUMP
090			_aTK7871.15.F5 A38 1994
245	0	0	_aAdvanced metallization for ULSI applications in 1993 : _bproceedings of the conference held October 5-7, 1993, San Diego, California, U.S.A., and October 26-27, 1993, Tokyo, Japan sponsored by Continuing Education in Engineering, University Extension, University of California, Berkeley, U.S.A. / _ceditors, David P. Favreau, Yosi Shacham-Diamand, Yasuhiro Horiike
260			_aPittsburgh, PA : _bMaterials Research Society, _cc1994
300			_axv, 611 p. : _bill. ; _c24 cm.
490	1		_aMaterials Research Society conference proceedings, _x1048-0854
504			_aIncludes bibliographical references and indexes
650		0	_aIntegrated circuits _xUltra large scale integration _xMaterials _xCongresses
650		0	_aMetallic films _xCongresses
650		0	_aVapor deposition _xCongresses
650		0	_aElectrochemical metallizing _xCongresses
700	1		_aFavreau, David P.
700	2		_aShacham-Diamand, Yosi
700	1		_aHoriike, Yasuhiro
710	2		_aUniversity of California, Berkeley. _bContinuing Education in Engineering
830		0	_aMaterials Research Society conference proceedings, _x1048-0854
999			_aVIRTUA40 _c64416 _d64422
999			_aVTLSSORT0080*0200*0201*0400*0900*2450*2600*3000*4900*5040*6500*6501*6502*6503*7000*7001*7002*7100*8300*9992