| 000 | 01675nam a2200313 a 4500 | ||
|---|---|---|---|
| 001 | vtls000059969 | ||
| 003 | KUKTEM | ||
| 005 | 20251125093413.0 | ||
| 008 | 120522t1998 paua f b 101 0 eng d | ||
| 020 | _a9781558994126 | ||
| 020 | _a1558994122 | ||
| 039 | 9 |
_a201212031247 _bfauzi _y201205221126 _zsafura |
|
| 040 | _aUMP | ||
| 090 | _aTK7874.76 .A38 1998 | ||
| 245 | 0 | 0 |
_aAdvanced metallization and interconnect systems for ULSI applications in 1997 : _bproceedings of the conference held September 30-October 2,1997, in San Diego, California, sponsored by Continuing Education in Engineering, University Extension, University of California at Berkeley, California, U.S.A., a parallel session of the conference was held from October 21-22, 1997, in Tokyo, Japan / _ceditors, Robin Cheung ... [et al.] |
| 260 |
_aWarrendale, Pa. : _bMaterials Research Society, _cc1998 |
||
| 300 |
_axviii, 765 p. : _bill. ; _c24 cm. |
||
| 490 | 1 |
_aConference proceedings, _x1048-0854 |
|
| 504 | _aIncludes bibliographical references and indexes | ||
| 650 | 0 |
_aIntegrated circuits _xUltra large scale integration _xDesign and construction _xCongresses |
|
| 650 | 0 |
_aIntegrated circuits _xUltra large scale integration _xMaterials _xCongresses |
|
| 650 | 0 |
_aVapor-plating _xCongresses |
|
| 650 | 0 |
_aElectrochemical metallizing _xCongresses |
|
| 650 | 0 |
_aDielectrics _xCongresses |
|
| 700 | 1 | _aCheung, Robin | |
| 710 | 2 |
_aUniversity of California, Berkeley. _bContinuing Education in Engineering |
|
| 830 | 0 | _aMaterials Research Society conference proceedings | |
| 999 |
_aVIRTUA40 _c64417 _d64423 |
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| 999 | _aVTLSSORT0080*0200*0201*0400*0900*2450*2600*3000*4900*5040*6500*6501*6502*6503*6504*7000*7100*8300*9992 | ||