| 000 | 01073nam a2200277 a 4500 | ||
|---|---|---|---|
| 001 | vtls000067144 | ||
| 003 | KUKTEM | ||
| 005 | 20251125093430.0 | ||
| 008 | 121128t2012 maua f b 001 0 eng d | ||
| 020 | _a9781437734836 | ||
| 020 | _a1437734839 | ||
| 039 | 9 |
_a201306111111 _bjamie _y201211281634 _zida |
|
| 040 | _aUMP | ||
| 090 | _aTS695 .H36 2012 | ||
| 245 | 0 | 0 |
_aHandbook of sputter deposition technology : _bfundamentals and applications for functional thin films, nanomaterials, and MEMS / _ceditors by Kiyotaka Wasa, Isaku Kanno, Hidetoshi Kotera |
| 250 | _a2nd ed. | ||
| 260 |
_aWaltham, MA : _bWilliam Andrew, _cc2012 |
||
| 300 |
_axii, 644 p. : _bill. ; _c24 cm. |
||
| 504 | _aIncludes bibliographical references and index | ||
| 650 | 0 |
_aCathode sputtering (Plating process) _vHandbooks, manuals, etc. |
|
| 650 | 0 |
_aThin films _vHandbooks, manuals, etc. |
|
| 700 | 1 | _aWasa, Kiyotaka | |
| 700 | 1 | _aKanno, Isaku | |
| 700 | 1 | _aKotera, Hidetoshi | |
| 999 |
_aVIRTUA40 _c64700 _d64706 |
||
| 999 | _aVTLSSORT0080*0200*0201*0400*0900*2450*2500*2600*3000*5040*6500*6501*7000*7001*7002*9992 | ||