| 000 | 01332nam a2200313 a 4500 | ||
|---|---|---|---|
| 001 | vtls000061743 | ||
| 003 | KUKTEM | ||
| 005 | 20251125093449.0 | ||
| 008 | 120612t1990 paua f b 001 0 eng d | ||
| 020 | _a9781558990463 | ||
| 020 | _a1558990461 | ||
| 039 | 9 |
_a201304030954 _bjamie _y201206121104 _zsafura |
|
| 040 | _aUMP | ||
| 090 | _aTK7871.85 .I57 1990 | ||
| 245 | 0 | 0 |
_aIn-situ patterning : _bselective area deposition and etching : symposium held November 29-December 1, 1989, Boston, Massachusetts, U.S.A. / _ceditors by Anthony F. Bernhardt, Jerry G. Black, Robert Rosenberg |
| 260 |
_aPittsburgh, PA : _bMaterials Research Society, _cc1990 |
||
| 300 |
_axi, 496 p. : _bill. ; _c24 cm. |
||
| 490 | 1 |
_aMaterials Research Society symposium proceedings ; _vv. 158 |
|
| 504 | _aIncludes bibliographical references and index | ||
| 650 | 0 |
_aSemiconductors _xEtching _xCongresses |
|
| 650 | 0 |
_aSemiconductor doping _xCongresses |
|
| 650 | 0 |
_aLasers _xIndustrial applications _xCongresses |
|
| 650 | 0 |
_aPlasma etching _xCongresses |
|
| 700 | 1 | _aBernhardt, Anthony F. | |
| 700 | 1 | _aBlack, Jerry G. | |
| 700 | 1 | _aRosenberg, Rosenberg | |
| 830 | 0 | _aMaterials Research Society symposium proceedings | |
| 999 |
_aVIRTUA40 _c65012 _d65018 |
||
| 999 | _aVTLSSORT0080*0200*0201*0400*0900*2450*2600*3000*4900*5040*6500*6501*6502*6503*7000*7001*7002*8300*9992 | ||