000			01239nam a2200301 a 4500
001			vtls000061813
003			KUKTEM
005			20251125093501.0
008			120613t1989 paua f b 001 0 eng d
020			_a9781558990203
020			_a1558990208
039		9	_a201304021432 _bjamie _y201206131056 _zsafura
040			_aUMP
090			_aTK7836 .I56 1989
245	0	0	_aIon beam processing of advanced electronic materials : _bsymposium held April 25-27, 1989, San Diego, California, U.S.A. / _ceditors by N. W. Cheung, A. D. Marwick, J. B. Roberto
260			_aPittsburgh, PA : _bMaterials Research Society, _cc1989
300			_axi, 401 p. : _bill. ; _c24 cm.
490	1		_aMaterials Research Society symposium proceedings ; _vv. 147
504			_aIncludes bibliographical references and index
650		0	_aElectronics _xMaterials _xEffect of radiation on _xCongresses
650		0	_aIon implantation _xCongresses
650		0	_aIon bombardment _xCongresses
700	1		_aCheung, N. W.
700	1		_aMarwick, A. D.
700	1		_aRoberto, J. B.
830		0	_aMaterials Research Society symposium proceedings
999			_aVIRTUA40 _c65220 _d65226
999			_aVTLSSORT0080*0200*0201*0400*0900*2450*2600*3000*4900*5040*6500*6501*6502*7000*7001*7002*8300*9992