| 000 | 01284nam a2200301 a 4500 | ||
|---|---|---|---|
| 001 | vtls000062124 | ||
| 003 | KUKTEM | ||
| 005 | 20251125093503.0 | ||
| 008 | 120618t2010 pauda f 001 0 eng d | ||
| 020 | _a9781605111957 | ||
| 020 | _a1605111953 | ||
| 039 | 9 |
_a201304180929 _bhuda _y201206181049 _zsafura |
|
| 040 | _aUMP | ||
| 090 | _aTK7875 .M53 2010 | ||
| 245 | 0 | 0 |
_aMicroelectromechanical systems--materials and devices III : _bsymposium held November 30-December 2, 2009, Boston, Massachusetts, U.S.A. / _ceditors, Jörg Bagdahn ... [et al.] |
| 260 |
_aWarrendale, PA : _bMaterials Research Society, _c2010 |
||
| 300 |
_aix, 211 p. : _bill. ; _c24 cm. |
||
| 490 | 1 |
_aMaterials Research Society symposium proceedings ; _vv. 1222 |
|
| 504 | _aIncludes bibliographical references and indexes | ||
| 650 | 0 |
_aMicroelectromechanical systems _xMaterials _vCongresses |
|
| 650 | 0 |
_aMicroelectromechanical systems _vCongresses |
|
| 650 | 0 |
_aThin films _vCongresses |
|
| 650 | 0 |
_aNanostructured materials _vCongresses |
|
| 650 | 0 |
_aSilicon _vCongresses |
|
| 700 | 1 | _aBagdahn, Jörg | |
| 830 | 0 |
_aMaterials Research Society symposia proceedings _vv. 1222 |
|
| 999 |
_aVIRTUA40 _c65234 _d65240 |
||
| 999 | _aVTLSSORT0080*0200*0201*0400*0900*2450*2600*3000*4900*5040*6500*6501*6502*6503*6504*7000*8300*9992 | ||