| 000 | 00981nam a2200265 a 4500 | ||
|---|---|---|---|
| 001 | vtls000066894 | ||
| 003 | KUKTEM | ||
| 005 | 20251125093554.0 | ||
| 008 | 121127t2012 maua f 001 0 eng d | ||
| 020 | _a9781437778175 (hbk.) | ||
| 020 | _a1437778178 (hbk.) | ||
| 039 | 9 |
_a201306201019 _bsaini _y201211270917 _zida |
|
| 040 | _aUMP | ||
| 090 | _aTK7871.15.F5 D67 2012 | ||
| 100 | 1 | _aDorey, Robert A. | |
| 245 | 1 | 0 |
_aCeramic thick films for MEMS and microdevices / _cRobert A. Dorey |
| 260 |
_aWaltham, MA : _bWilliam Andrew, _c2012 |
||
| 300 |
_axviii, 191 p. : _bill. ; _c24 cm. |
||
| 490 | 0 | _aMicro and nano technologies series | |
| 504 | _aIncludes bibliographical references (p. 183-185) and index | ||
| 650 | 0 |
_aThick-film circuits _xDesign and construction |
|
| 650 | 0 |
_aMicroelectromechanical systems _xDesign and construction |
|
| 650 | 0 | _aNanoelectronics | |
| 999 |
_aVIRTUA40 _c65984 _d65990 |
||
| 999 | _aVTLSSORT0080*0200*0201*0400*0900*1000*2450*2600*3000*4900*5040*6500*6501*6502*9992 | ||