000 01163nam a2200253 a 4500
001 vtls000061732
003 KUKTEM
005 20251125093605.0
008 120612t2011 enka f 001 0 eng d
020 _a9780521766586 (hbk.)
039 9 _a201304261316
_bsaini
_c201303271126
_dsaini
_y201206121007
_zsafura
040 _aUMP
090 _aTK7875 .K46 2011
100 1 _aKempe, Volker
245 1 0 _aInertial MEMS :
_bprinciples and practice /
_cVolker Kempe
260 _aCambridge :
_bCambridge University Press,
_c2011
300 _axiv, 475 p. :
_bill. (some col.) ;
_c26 cm.
504 _aIncludes bibliographical references and index
505 8 _aMachine generated contents note: Preface; Acknowledgement; Notation; 1. Introduction; 2. Transducers; 3. Non-inertial forces; 4. MEMS - technologies; 5. First level packaging; 6. Electrical interfaces; 7. Accelerometers; 8. Gyroscopes; 9. Test and calibration; 10. Concluding remarks; Index
650 0 _aMicroelectromechanical systems
650 0 _aInertial navigation systems
650 0 _aBioMEMS
999 _aVIRTUA40
_c66163
_d66169
999 _aVTLSSORT0080*0200*0400*0900*1000*2450*2600*3000*5040*5050*6500*6501*6502*9992