| 000 | 01427nam a2200301 a 4500 | ||
|---|---|---|---|
| 001 | vtls000060042 | ||
| 003 | KUKTEM | ||
| 005 | 20251125093605.0 | ||
| 008 | 120522t1999 pauda f 001 0 eng d | ||
| 020 | _a9781558994843 | ||
| 020 | _a155899484X | ||
| 039 | 9 |
_a201303271310 _bsaini _y201205221548 _zsafura |
|
| 040 | _aUMP | ||
| 090 | _aTK7871.85 .M48 1999 | ||
| 111 | 2 | _aAdvanced Metallization Conference | |
| 245 | 1 | 0 |
_aAdvanced Metallization Conference in 1998 (AMC 1998) : _bproceedings of the conference held October 6-8, 1998, in Colorado Springs, Colorado; parallel session was held September 3-4, 1998 in Tokyo, Japan / _ceditors, G. S. Sandhu, H. Koerner, M. Murakami and Y. Yasuda, N. Kobayashi |
| 246 | 1 | _aVols. for 1999-<2000> have title: Advanced Metallization Conference | |
| 260 |
_aWarrendale, Pa. : _bMaterials Research Society, _c1999 |
||
| 300 |
_av. : _bill. ; _c24 cm. |
||
| 650 | 0 |
_aSemiconductors _xDesign and construction _vCongresses |
|
| 650 | 0 |
_aIntegrated circuits _xUltra large scale integration _xMaterials _vCongresses |
|
| 650 | 0 |
_aIntegrated circuits _xUltra large scale integration _xDesign and construction _vCongresses |
|
| 650 | 0 |
_aThin films _vCongresses |
|
| 650 | 0 |
_aMetallizing _vCongresse |
|
| 700 | 1 | _aSandhu, G. S. | |
| 710 | 2 | _aMaterials Research Society | |
| 999 |
_aVIRTUA40 _c66168 _d66174 |
||
| 999 | _aVTLSSORT0080*0200*0201*0400*0900*1110*2450*2460*2600*3000*6500*6501*6502*6503*6504*7000*7100*9992 | ||