| 000 | 01284nam a2200301 a 4500 | ||
|---|---|---|---|
| 001 | vtls000061945 | ||
| 003 | KUKTEM | ||
| 005 | 20251125093616.0 | ||
| 008 | 120614t2000 paua f b 001 0 eng d | ||
| 020 | _a9781558994928 | ||
| 020 | _a1558994920 | ||
| 039 | 9 |
_a201304031125 _bjamie _y201206141625 _zsafura |
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| 040 | _aUMP | ||
| 090 | _aTK7874 .M38 2000 | ||
| 245 | 0 | 0 |
_aMaterials issues and modeling for device nanofabrication : _bsymposia held November 29-December 2, 1999, Boston, Massachusetts, U.S.A. / _ceditors by Lhadi Merhari ... [et al.] |
| 260 |
_aWarrendale, PA : _bMaterials Research Society, _cc2000 |
||
| 300 |
_axiii, 340 p. : _bill. ; _c24 cm. |
||
| 490 | 1 |
_aMaterials Research Society symposium proceedings ; _vv. 584 |
|
| 504 | _aIncludes bibliographical references and index | ||
| 650 | 0 |
_aIntegrated circuits _xDesign and construction _vCongresses |
|
| 650 | 0 |
_aNanotechnology _xCongresses |
|
| 650 | 0 |
_aIntegrated circuits _xMaterials _vCongresses |
|
| 650 | 0 |
_aMolecular electronics _vCongresses |
|
| 650 | 0 |
_aMicrolithography _vCongresses |
|
| 700 | 1 | _aMerhari, Lhadi | |
| 830 | 0 | _aMaterials Research Society symposium proceedings | |
| 999 |
_aVIRTUA40 _c66346 _d66352 |
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