000			01159nam a2200277 a 4500
001			vtls000060649
003			KUKTEM
005			20251125093622.0
008			120531t2000 paudao f 001 0 eng d
020			_a9781558994737
020			_a1558994734
039		9	_a201304091444 _bhuda _y201205310932 _zsafura
040			_aUMP
090			_aTS654.5 .C44 2000
245	0	0	_aChemical-mechanical polishing--fundamentals and challenges : _bsymposium held April 5-7, 1999, San Francisco, California, U.S.A. / _ceditors, S.V. Babu ... [et al.]
260			_aWarrendale, PA : _bMaterials Research Society, _c2000
300			_aix, 281 p. : _bill. ; _c24 cm.
490	1		_aMaterials Research Society symposium proceedings ; _vv. 566
504			_aIncludes bibliographical references and index
650		0	_aElectrolytic polishing _vCongresses
650		0	_aGrinding and polishing _vCongresses
650		0	_aChemical mechanical planarization _vCongresses
700	1		_aBabu, S. V.
830		0	_aMaterials Research Society symposia proceedings ; _vv. 566
999			_aVIRTUA40 _c66443 _d66449
999			_aVTLSSORT0080*0200*0201*0400*0900*2450*2600*3000*4900*5040*6500*6501*6502*7000*8300*9992