| 000 | 01164nam a2200277 a 4500 | ||
|---|---|---|---|
| 001 | vtls000060873 | ||
| 003 | KUKTEM | ||
| 005 | 20251125093652.0 | ||
| 008 | 120601t1997 pauao f 001 0 eng d | ||
| 020 | _a978155899373 | ||
| 020 | _a1558993738 | ||
| 039 | 9 |
_a201304101301 _bhuda _y201206011130 _zsafura |
|
| 040 | _aUMP | ||
| 090 | _aTK7871.85 .D44 1997 | ||
| 245 | 0 | 0 |
_aDefects and diffusion in silicon processing : _bsymposium held April 1-4, 1997, San Francisco, California, U.S.A. / _ceditors, Tomas Diaz de la Rubia ... [et al.] |
| 260 |
_aPittsburgh, PA : _bMaterials Research Society, _c1997 |
||
| 300 |
_axv, 541 p. : _bill. ; _c24 cm. |
||
| 490 | 1 |
_aMaterials Research Society symposium proceedings ; _vv. 469 |
|
| 504 | _aIncludes bibliographical references and index | ||
| 650 | 0 |
_aSemiconductors _xDefects _xCongresses |
|
| 650 | 0 |
_aSemiconductor doping _xCongresses |
|
| 650 | 0 |
_aSilicon crystals x Defects _xCongresses |
|
| 700 | 1 | _aDiaz de la Rubia, Tomas | |
| 830 | 0 |
_aMaterials Research Society symposia proceedings ; _vv. 469 |
|
| 999 |
_aVIRTUA40 _c66948 _d66954 |
||
| 999 | _aVTLSSORT0080*0200*0201*0400*0900*2450*2600*3000*4900*5040*6500*6501*6502*7000*8300*9992 | ||