| 000 | 01414nam a2200313 a 4500 | ||
|---|---|---|---|
| 001 | vtls000062030 | ||
| 003 | KUKTEM | ||
| 005 | 20251125093706.0 | ||
| 008 | 120615t2005 paudao f 001 0 eng d | ||
| 020 | _a9781558998230 | ||
| 020 | _a1558998233 | ||
| 039 | 9 |
_a201304161459 _bhuda _y201206151215 _zsafura |
|
| 040 | _aUMP | ||
| 090 | _aTK7871.85 .M38 2005 | ||
| 245 | 0 | 0 |
_aMaterials, integration and technology for monolithic instruments : _bsymposium held March 29-30, 2005, San Francisco, California, USA / _ceditors: Jeremy A. Theil ... [et al.] |
| 260 |
_aWarrendale, PA : _bMaterials Research Society, _c2005 |
||
| 300 |
_aix, 171 p. : _bill. ; _c24 cm. |
||
| 490 | 1 |
_aMaterials Research Society symposium proceedings ; _vv. 869 |
|
| 504 | _aIncludes bibliographical references and indexes | ||
| 650 | 0 |
_aSemiconductors _xDesign and construction _vCongresses |
|
| 650 | 0 |
_aIntegrated circuits _xUltra large scale integration _xDesign and construction _vCongresses |
|
| 650 | 0 |
_aIntegrated circuits _xUltra large scale integration _xMaterials _vCongresses |
|
| 650 | 0 |
_aThin films _vCongresses |
|
| 650 | 0 |
_aMetallic films _vCongresses |
|
| 650 | 0 |
_aMetallizing _vCongresses |
|
| 700 | 1 | _aTheil, Jeremy A. | |
| 830 | 0 |
_aMaterials Research Society symposia proceedings ; _vv. 869 |
|
| 999 |
_aVIRTUA40 _c67215 _d67221 |
||
| 999 | _aVTLSSORT0080*0200*0201*0400*0900*2450*2600*3000*4900*5040*6500*6501*6502*6503*6504*6505*7000*8300*9992 | ||