| 000 | 01506nam a2200325 4500 | ||
|---|---|---|---|
| 001 | vtls000062118 | ||
| 003 | KUKTEM | ||
| 005 | 20251125093706.0 | ||
| 008 | 120618t2009 paudao f 001 0 eng d | ||
| 020 | _a9781605111117 | ||
| 020 | _a1605111112 | ||
| 039 | 9 |
_a201304161542 _bhuda _c201304161541 _dhuda _y201206181030 _zsafura |
|
| 040 | _aUMP | ||
| 090 | _aTK7875 .S96 2008 | ||
| 111 | 2 |
_aSymposium GG, "Microelectromechanical systems--Materials and Devices II" _d(2008 : _cBoston, Mass.) |
|
| 245 | 1 | 0 |
_aMicroelectromechanical systems--materials and devices II : _bsymposium held December 1-2, 2008, Boston, Massachusetts, U.S.A. / _ceditors, Srikar Vengallatore ... [et al.] |
| 260 |
_aWarrendale, PA : _bMaterials Research Society, _c2009 |
||
| 300 |
_axi, 247 p. : _bill. ; _c24 cm. |
||
| 490 | 1 |
_aMaterials Research Society symposium proceedings ; _vv. 1139 |
|
| 504 | _aIncludes bibliographical references and indexes | ||
| 650 | 0 |
_aMicroelectromechanical systems _xMaterials _vCongresses |
|
| 650 | 0 |
_aMicroelectromechanical systems _vCongresses |
|
| 650 | 0 |
_aThin films _vCongresses |
|
| 650 | 0 |
_aNanostructured materials _vCongresses |
|
| 650 | 0 |
_aSilicon _vCongresses |
|
| 700 | 1 | _aVengallatore, Srikar | |
| 710 | 2 |
_aMaterials Research Society. _bMeeting d (2008 : _cBoston, Mass.) |
|
| 830 | 0 |
_aMaterials Research Society symposia proceedings ; _vv. 1139 |
|
| 999 |
_aVIRTUA40 _c67218 _d67224 |
||
| 999 | _aVTLSSORT0080*0200*0201*0400*0900*1110*2450*2600*3000*4900*5040*6500*6501*6502*6503*6504*7000*7100*8300*9992 | ||