| 000 | 01244nam a2200289 4500 | ||
|---|---|---|---|
| 001 | vtls000061492 | ||
| 003 | KUKTEM | ||
| 005 | 20251125093708.0 | ||
| 008 | 120608t2002 pauda f 001 0 eng d | ||
| 020 | _a9781558996069 | ||
| 020 | _a1558996060 | ||
| 039 | 9 |
_a201304301525 _bhuda _y201206081008 _zsafura |
|
| 040 | _aUMP | ||
| 090 | _aTK7874.76 .G38 2002 | ||
| 245 | 0 | 0 |
_aGate stack and silicide issues in silicon processing II : _bsymposium held April 17-19, 2001, San Francisco, California, U.S.A. / _ceditors, S.A. Campbell ... [et al.] |
| 260 |
_aWarrendale, PA : _bMaterials Research Society, _c2002 |
||
| 300 |
_a1 v. (various pagings) : _bill. ; _c24 cm. |
||
| 490 | 1 |
_aMaterials Research Society symposium proceedings ; _vv. 670 |
|
| 504 | _aIncludes bibliographical references and indexes | ||
| 650 | 0 |
_aIntegrated circuits _xUltra large scale integration _xMaterials _vCongresses |
|
| 650 | 0 |
_aSilicides _vCongresses |
|
| 650 | 0 |
_aGate array circuits _vCongresses |
|
| 650 | 0 |
_aElectric leakage _vCongresses |
|
| 700 | 1 | _aCampbell, S. A. | |
| 830 | 0 |
_aMaterials Research Society symposia proceedings ; _vv. 670 |
|
| 999 |
_aVIRTUA40 _c67244 _d67250 |
||
| 999 | _aVTLSSORT0080*0200*0201*0400*0900*2450*2600*3000*4900*5040*6500*6501*6502*6503*7000*8300*9992 | ||