| 000 | 01410nam a2200313 a 4500 | ||
|---|---|---|---|
| 001 | vtls000062237 | ||
| 003 | KUKTEM | ||
| 005 | 20251125093708.0 | ||
| 008 | 120618t2002 paua f 001 0 eng d | ||
| 020 | _a9781558996410 | ||
| 020 | _a1558996419 | ||
| 039 | 9 |
_a201306071113 _bsaini _y201206181350 _zsafura |
|
| 040 | _aUMP | ||
| 090 | _aQC176.8.N35 N366 2002 | ||
| 111 | 2 |
_aSymposium Y, "Nanopatterning--From Ultralarge-Scale Integration to Biotechnology" _d(2001 : _cBoston, Mass.) |
|
| 245 | 1 | 0 |
_aNanopatterning--from ultralarge-scale integration to biotechnology : _bsymposium held November 25-29, 2001, Boston, Massachusetts, U.S.A. / _ceditors, Lhadi Merhari ... [et al.] |
| 260 |
_aWarrendale, Pa. : _bMaterials Research Society, _c2002 |
||
| 300 |
_axiii, 338 p. : _bill. ; _c24 cm. |
||
| 490 | 1 |
_aMaterials Research Society symposium proceedings ; _vv. 705 |
|
| 504 | _aIncludes bibliographical references and index | ||
| 650 | 0 |
_aNanostructures _vCongresses |
|
| 650 | 0 |
_aNanotechnology _vCongresses |
|
| 650 | 0 |
_aMicrolithography _vCongresses |
|
| 650 | 0 |
_aIntegrated circuits _xUltra large scale integration _vCongresses |
|
| 650 | 0 |
_aBiotechnology _vCongresses |
|
| 700 | 1 | _aMerhari, Lhadi | |
| 830 | 0 |
_aMaterials Research Society symposium proceedings ; _vv. 705 |
|
| 999 |
_aVIRTUA40 _c67258 _d67264 |
||
| 999 | _aVTLSSORT0080*0200*0201*0400*0900*1110*2450*2600*3000*4900*5040*6500*6501*6502*6503*6504*7000*8300*9992 | ||