000 01410nam a2200313 a 4500
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008 120618t2002 paua f 001 0 eng d
020 _a9781558996410
020 _a1558996419
039 9 _a201306071113
_bsaini
_y201206181350
_zsafura
040 _aUMP
090 _aQC176.8.N35 N366 2002
111 2 _aSymposium Y, "Nanopatterning--From Ultralarge-Scale Integration to Biotechnology"
_d(2001 :
_cBoston, Mass.)
245 1 0 _aNanopatterning--from ultralarge-scale integration to biotechnology :
_bsymposium held November 25-29, 2001, Boston, Massachusetts, U.S.A. /
_ceditors, Lhadi Merhari ... [et al.]
260 _aWarrendale, Pa. :
_bMaterials Research Society,
_c2002
300 _axiii, 338 p. :
_bill. ;
_c24 cm.
490 1 _aMaterials Research Society symposium proceedings ;
_vv. 705
504 _aIncludes bibliographical references and index
650 0 _aNanostructures
_vCongresses
650 0 _aNanotechnology
_vCongresses
650 0 _aMicrolithography
_vCongresses
650 0 _aIntegrated circuits
_xUltra large scale integration
_vCongresses
650 0 _aBiotechnology
_vCongresses
700 1 _aMerhari, Lhadi
830 0 _aMaterials Research Society symposium proceedings ;
_vv. 705
999 _aVIRTUA40
_c67258
_d67264
999 _aVTLSSORT0080*0200*0201*0400*0900*1110*2450*2600*3000*4900*5040*6500*6501*6502*6503*6504*7000*8300*9992