| 000 | 01340nam a2200301 a 4500 | ||
|---|---|---|---|
| 001 | vtls000062045 | ||
| 003 | KUKTEM | ||
| 005 | 20251125093712.0 | ||
| 008 | 120615t2009 paudao f 001 0 eng d | ||
| 020 | _a9781605111292 | ||
| 020 | _a1605111295 | ||
| 039 | 9 |
_a201304161654 _bhuda _y201206151503 _zsafura |
|
| 040 | _aUMP | ||
| 090 | _aTK7874.53 .M38 2009 | ||
| 245 | 0 | 0 |
_aMaterials, processes, and reliability for advanced interconnects for micro- and nanoelectronics--2009 : _bsymposium held April 14-17, 2009, San Francisco, California, U.S.A. / _ceditors, Martin Gall ... [et al.] |
| 260 |
_aWarrendale, PA : _bMaterials Research Society, _c2009 |
||
| 300 |
_aviii, 189 p. : _bill. ; _c24 cm. |
||
| 490 | 1 |
_aMaterials Research Society symposium proceedings ; _vv. 1156 |
|
| 504 | _aIncludes bibliographical references and indexes | ||
| 650 | 0 |
_aInterconnects (Integrated circuit technology) _vCongresses |
|
| 650 | 0 |
_aIntegrated circuits _xVery large scale integration _vCongresses |
|
| 650 | 0 |
_aMicroelectronics _vCongresses |
|
| 650 | 0 |
_aNanoelectronics _vCongresses |
|
| 650 | 0 |
_aMaterials _vCongresses |
|
| 700 | 1 | _aGall, Martin | |
| 830 | 0 |
_aMaterials Research Society symposia proceedings ; _vv. 1156 |
|
| 999 |
_aVIRTUA40 _c67317 _d67323 |
||
| 999 | _aVTLSSORT0080*0200*0201*0400*0900*2450*2600*3000*4900*5040*6500*6501*6502*6503*6504*7000*8300*9992 | ||