000			01291nam a2200301 a 4500
001			vtls000061833
003			KUKTEM
005			20251125093716.0
008			120613t1988 paua f b 001 0 eng d
020			_a9780931837692
020			_a0931837693
039		9	_a201304021511 _bjamie _y201206131148 _zsafura
040			_aUMP
090			_aTK7874 .L37 1988
245	0	0	_aLaser and particle-beam chemical processing for microelectronics : _bsymposium held December 1-3, 1987, Boston, Massachusetts, U.S.A. / _ceditors by Daniel J. Ehrlich, Gregg S. Higashi, Modest M. Oprysko
260			_aPittsburgh, PA : _bMaterials Research Society, _cc1988
300			_axv, 509 p. : _bill. ; _c24 cm.
490	1		_aMaterials Research Society symposium proceedings ; _vv. 101
504			_aIncludes bibliographies references and index
650		0	_aIntegrated circuits _xDesign and construction _xCongresses
650		0	_aLasers _xIndustrial applications _xCongresses
650		0	_aLasers in chemistry _xCongresses
700	1		_aEhrlich, Daniel J.
700	1		_aHigashi, Gregg S.
700	1		_aOprysko, Modest M.
830		0	_aMaterials Research Society symposia proceedings
999			_aVIRTUA40 _c67389 _d67395
999			_aVTLSSORT0080*0200*0201*0400*0900*2450*2600*3000*4900*5040*6500*6501*6502*7000*7001*7002*8300*9992