000 01234nam a2200289 a 4500
001 vtls000061975
003 KUKTEM
005 20251125093728.0
008 120615t1997 paua f 001 0 eng d
020 _a9781558993426
020 _a1558993428
039 9 _a201303291629
_bsaini
_y201206151031
_zsafura
040 _aUMP
090 _aTA418.6 .M38 1997
245 0 0 _aMaterials modification and synthesis by ion beam processing :
_bsymposium held December 2-5, 1996, Boston, Massachusetts, U.S.A. /
_ceditors, Dale E. Alexander ... [et al.]
260 _aPittsburgh, Pa. :
_bMaterials Research Society,
_c1997
300 _axix, 727 p. :
_bill. ;
_c24 cm.
490 1 _aMaterials Research Society symposium proceedings ;
_vv. 438
504 _aIncludes bibliographical references and index
650 0 _aMaterials
_xEffect of radiation on
_vCongresses
650 0 _aIon implantation
_vCongresses
650 0 _aSemiconductor doping
_vCongresses
650 0 _aSilicon
_xEffect of radiation on
_vCongresses
700 1 _aAlexander, Dale S.
830 0 _aMaterials Research Society symposia proceedings ;
_vv. 438
999 _aVIRTUA40
_c67602
_d67608
999 _aVTLSSORT0080*0200*0201*0400*0900*2450*2600*3000*4900*5040*6500*6501*6502*6503*7000*8300*9992