| 000 | 01174nam a2200289 a 4500 | ||
|---|---|---|---|
| 001 | vtls000061972 | ||
| 003 | KUKTEM | ||
| 005 | 20251125093728.0 | ||
| 008 | 120615t1998 paua f 001 0 eng d | ||
| 020 | _a9781558994157 | ||
| 020 | _a1558994157 | ||
| 039 | 9 |
_a201303291652 _bsaini _y201206151026 _zsafura |
|
| 040 | _aUMP | ||
| 090 | _aTK7874 .M38 1998 | ||
| 245 | 0 | 0 |
_aMaterials issues in vacuum microelectronics : _bsymposium held April 13-16, 1998, San Francisco, California, U.S.A. / _ceditors, Wei Zhu ... [et al.] |
| 260 |
_aWarrendale, Pa. : _bMaterials Research Society, _c1998 |
||
| 300 |
_axi, 207 p. : _bill. ; _c24 cm. |
||
| 490 | 1 |
_aMaterials Research Society symposium proceedings ; _vv. 509 |
|
| 504 | _aIncludes bibliographical references and indexes | ||
| 650 | 0 |
_aVacuum microelectronics _vCongresses |
|
| 650 | 0 |
_aThin films _vCongresses |
|
| 650 | 0 |
_aField emission cathodes _vCongresses |
|
| 650 | 0 |
_aIon implantation _vCongresses |
|
| 700 | 1 | _aZhu, Wei | |
| 830 | 0 |
_aMaterials Research Society symposium proceedings ; _vv. 509 |
|
| 999 |
_aVIRTUA40 _c67603 _d67609 |
||
| 999 | _aVTLSSORT0080*0200*0201*0400*0900*2450*2600*3000*4900*5040*6500*6501*6502*6503*7000*8300*9992 | ||