| 000 | 01158nam a2200265 a 4500 | ||
|---|---|---|---|
| 001 | vtls000061056 | ||
| 003 | KUKTEM | ||
| 005 | 20251125093734.0 | ||
| 008 | 120605t2008 pauda f 001 0 eng d | ||
| 020 | _a9781605110400 | ||
| 039 | 9 |
_a201304121041 _bhuda _c201304121019 _dhuda _y201206051433 _zsafura |
|
| 040 | _aUMP | ||
| 090 | _aTK7871.85 .D67 2008 | ||
| 245 | 0 | 0 |
_aDoping engineering for front-end processing : _bsymposium held March 25-27, 2008, San Francisco, California, U.S.A. / _ceditors, B.J. Pawlak ... [et al.] |
| 260 |
_aWarrendale, PA : _bMaterials Research Society, _cc2008 |
||
| 300 |
_axi, 319 p. : _bill. ; _c24 cm. |
||
| 490 | 1 |
_aMaterials Research Society symposium proceedings ; _vv. 1070 |
|
| 504 | _aIncludes bibliographical references and indexes | ||
| 650 | 0 |
_aSemiconductor doping _vCongresses |
|
| 650 | 0 |
_aSemiconductor doping _xProcessing _vCongresses |
|
| 650 | 0 |
_aSemiconductors _xMaterials _vCongresses |
|
| 700 | 1 |
_aPawlak, B. J. _q(Bartek J.) |
|
| 830 | 0 |
_aMaterials Research Society symposia proceedings ; _vv. 1070 |
|
| 999 |
_aVIRTUA40 _c67690 _d67696 |
||
| 999 | _aVTLSSORT0080*0200*0400*0900*2450*2600*3000*4900*5040*6500*6501*6502*7000*8300*9992 | ||