| 000 | 01522nam a2200313 a 4500 | ||
|---|---|---|---|
| 001 | vtls000062047 | ||
| 003 | KUKTEM | ||
| 005 | 20251125093745.0 | ||
| 008 | 120615t2007 paudao f 001 0 eng d | ||
| 020 | _a9781558999503 | ||
| 020 | _a1558999507 | ||
| 039 | 9 |
_a201304181017 _bhuda _y201206151511 _zsafura |
|
| 040 | _aUMP | ||
| 090 | _aTK7874.53 .S96 2007 | ||
| 111 | 2 |
_aSymposium B, "Materials, Processes, Integration and Reliability in Advanced Interconnects for Micro- and Nanoelectronics" _d(2007 : _cSan Francisco, Calif.) |
|
| 245 | 1 | 0 |
_aMaterials, processes, integration and reliability in advanced interconnects for micro- and nanoelectronics : _bsymposium held April 10-12, 2007, San Francisco, California, U.S.A. / _ceditors: Qinghuang Lin ... [et al.] |
| 260 |
_aWarrendale, PA : _bMaterials Research Society, _c2007 |
||
| 300 |
_axiv, 338 p. : _bill. ; _c24 cm. |
||
| 490 | 1 |
_aMaterials Research Society symposium proceedings ; _vv. 990 |
|
| 504 | _aIncludes bibliographical references and indexes | ||
| 650 | 0 |
_aInterconnects (Integrated circuit technology) _vCongresses |
|
| 650 | 0 |
_aIntegrated circuits _xVery large scale integration _vCongresses |
|
| 650 | 0 |
_aMicroelectronics _vCongresses |
|
| 650 | 0 |
_aNanoelectronics _vCongresses |
|
| 650 | 0 |
_aMaterials _vCongresses |
|
| 700 | 1 | _aLin, Qinghuang | |
| 830 | 0 |
_aMaterials Research Society symposia proceedings ; _vv. 990 |
|
| 999 |
_aVIRTUA40 _c67889 _d67895 |
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| 999 | _aVTLSSORT0080*0200*0201*0400*0900*1110*2450*2600*3000*4900*5040*6500*6501*6502*6503*6504*7000*8300*9992 | ||