| 000 | 01492nam a2200301 a 4500 | ||
|---|---|---|---|
| 001 | vtls000062046 | ||
| 003 | KUKTEM | ||
| 005 | 20251125093745.0 | ||
| 008 | 120615t2012 nyudao f 001 0 eng d | ||
| 020 | _a9781605113128 | ||
| 020 | _a1605113123 | ||
| 039 | 9 |
_a201304181035 _bhuda _y201206151507 _zsafura |
|
| 040 | _aUMP | ||
| 090 | _aTK7874.53 .S96 2012 | ||
| 111 | 2 |
_aSymposium O, "Materials, Processes, and Reliability for Advanced Interconnects for Micro- and Nanoelectronics" _d(2011 : _cSan Francisco, Calif.) |
|
| 245 | 1 | 0 |
_aMaterials, processes, and reliability for advanced interconnects for micro- and nanoelectronics--2011 : _bsymposium held April 25-29, 2011, San Francisco, California, U.S.A. / _ceditors, Mikhail R. Baklanov ... [et al.] |
| 260 |
_aNew York : _bCambridge University Press, _c2012 |
||
| 300 |
_aix, 127 p. : _bill. ; _c24 cm. |
||
| 490 | 1 |
_aMaterials Research Society symposium proceedings ; _vv. 1335 |
|
| 504 | _aIncludes bibliographical references and indexes | ||
| 650 | 0 |
_aInterconnects (Integrated circuit technology) _Integrated circuits _xVery large scale integration _vCongressesv Congresses |
|
| 650 | 0 |
_aMicroelectronics _vCongresses |
|
| 650 | 0 |
_aNanoelectronics _vCongresses |
|
| 650 | 0 |
_aMaterials _vCongresses |
|
| 700 | 1 | _aBaklanov, Mikhail R. | |
| 830 | 0 |
_aMaterials Research Society symposia proceedings ; _vv. 1335 |
|
| 999 |
_aVIRTUA40 _c67890 _d67896 |
||
| 999 | _aVTLSSORT0080*0200*0201*0400*0900*1110*2450*2600*3000*4900*5040*6500*6501*6502*6503*7000*8300*9992 | ||