| 000 | 00808nam a2200241 a 4500 | ||
|---|---|---|---|
| 001 | vtls000074959 | ||
| 003 | KUKTEM | ||
| 005 | 20251125093804.0 | ||
| 008 | 131003t2013 nyua f bi 001 0 eng d | ||
| 020 | _a9780521764834 | ||
| 020 | _a0521764831 | ||
| 039 | 9 |
_a201408131147 _bsafura _y201310031220 _zfauzi |
|
| 040 | _aUMP | ||
| 090 | _aTK7875 .J66 2013 | ||
| 100 | 1 | _aJones, T. B. | |
| 245 | 1 | 0 |
_aElectromechanics and MEMS / _cThomas B. Jones, Nenad G. Nenadic. |
| 260 |
_aNew York : _bCambridge University Press, _c2013 |
||
| 300 |
_axx, 559 p. : _bill. ; _c26 cm. |
||
| 504 | _aIncludes bibliographical references and index | ||
| 650 | 0 | _aMicroelectromechanical systems | |
| 700 | 1 | _aNenadic, Nenad G. | |
| 999 |
_aVIRTUA40 _c68214 _d68220 |
||
| 999 | _aVTLSSORT0080*0200*0201*0400*0900*1000*2450*2600*3000*5040*6500*7000*9992 | ||