000 01308nam a2200301 a 4500
001 vtls000061923
003 KUKTEM
005 20251125093815.0
008 120614t2001 paua f 001 0 eng d
020 _a9781558995321
020 _a1558995323
039 9 _a201307091110
_bsaini
_y201206141501
_zsafura
040 _aUMP
090 _aTK7871 .M38 2001
245 0 0 _aMaterials development for direct write technologies :
_bsymposium held April 24-26, 2000, San Francisco, California, U.S.A. /
_ceditors, Douglas B. Chrisey ... [et al.]
260 _aWarrendale, Pa. :
_bMaterials Research Society,
_c2001
300 _aOxiv, 283 p. :
_bill. ;
_c24 cm.
490 1 _aMaterials Research Society symposium proceedings ;
_vv. 624
504 _aIncludes bibliographical references and indexes
650 0 _aElectronics
_xMaterials
_vCongresses
650 0 _aMicrolithography
_xMaterials
_vCongresses
650 0 _aIntegrated circuits
_xMaterials
_vCongresses
650 0 _aMasks (Electronics)
_xMaterials
_vCongresses
650 0 _aLasers
_xIndustrial applications
_vCongresses
700 1 _aChrisey, Douglas B.
830 0 _aMaterials Research Society symposium proceedings ;
_vv. 624
999 _aVIRTUA40
_c68402
_d68408
999 _aVTLSSORT0080*0200*0201*0400*0900*2450*2600*3000*4900*5040*6500*6501*6502*6503*6504*7000*8300*9992