000			01409nam a2200325 a 4500
001			vtls000062492
003			KUKTEM
005			20251125093821.0
008			120619t1987 paua f 001 0 eng d
020			_a9780931837418
020			_a0931837413
039		9	_a201307091127 _bsaini _y201206191441 _zsafura
040			_aUMP
090			_aTA418.6 .P46 1987
245	0	0	_aPhoton, beam, and plasma stimulated chemical processes at surfaces : _bsymposium held December 1-4, 1986, Boston, Massachusetts, U.S.A. / _ceditors, Vincent M. Donnelly, Irving P. Herman, Masataka Hirose
260			_aPittsburgh, Pa. : _bMaterials Research Society, _c1987
300			_axix, 826 p. : _bill. ; _c24 cm.
490	1		_aMaterials Research Society symposia proceedings, _x0272-9172 ; _vv. 75
504			_aIncludes bibliographies and indexes
650		0	_aMaterials _xEffect of radiation on _vCongresses
650		0	_aSurface chemistry _vCongresses
650		0	_aLasers _xIndustrial applications _vCongresses
650		0	_aPhoton beams _xIndustrial applications _vCongresses
650		0	_aPlasma etching _vCongresses
700	1		_aDonnelly, Vincent M.
700	1		_aHerman, Irving P.
700	1		_aHirose, Masataka
830		0	_aMaterials Research Society symposia proceedings ; _vv. 75
999			_aVIRTUA40 _c68497 _d68503
999			_aVTLSSORT0080*0200*0201*0400*0900*2450*2600*3000*4900*5040*6500*6501*6502*6503*6504*7000*7001*7002*8300*9992