| 000 | 01336nam a2200277 a 4500 | ||
|---|---|---|---|
| 001 | vtls000075648 | ||
| 003 | KUKTEM | ||
| 005 | 20251125093845.0 | ||
| 008 | 131018t2011 pau f 001 0 eng d | ||
| 020 | _a9781605113920 hbk. | ||
| 039 | 9 |
_a201905061531 _bAUTHORITY _c201410011056 _dsafura _c201410011055 _dsafura _y201310181228 _zida |
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| 040 | _aUMP | ||
| 090 | _aTK7875 .S96 2011 | ||
| 111 | 2 |
_aSymposium TT, "Microelectromechanical Systems--Materials and Devices V" d (2011 : _cBoston, Mass.) |
|
| 245 | 1 | 0 |
_aMEMS, bioMEMS and bioelectronics--materials and devices : _bsymposium held November 28-December 2, 2011, Boston, Massachusetts, U.S.A. / _ceditors, Tim Albrecht ... [et al.]. |
| 260 |
_aWarrendale, Pa. : _bMaterials Research Society, _c2012 |
||
| 300 |
_ax, 221 p. : _bill ; _c24 cm. |
||
| 490 | 0 |
_aMRS proceedings, _x1946-4274 ; _vv. 1415 |
|
| 500 | _aContains proceedings of Symposia TT, II, and HH of the 2011 MRS Fall Meeting, held Nov. 28-Dec. 2, 2011, in Boston, Mass | ||
| 504 | _aIncludes bibliographical references and indexes | ||
| 650 | 0 |
_aMicroelectromechanical systems _vCongresses |
|
| 650 | 0 |
_aBiotechnology _vCongresses |
|
| 650 | 0 |
_aBioelectronics _xCongresses |
|
| 700 | 1 | _aAlbrecht, Tim. | |
| 999 |
_aVIRTUA40 _c68915 _d68921 |
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| 999 | _aVTLSSORT0080*0200*0400*0900*1110*2450*2600*3000*4900*5000*5040*6500*6501*6502*7000*9992 | ||