000 01336nam a2200277 a 4500
001 vtls000075648
003 KUKTEM
005 20251125093845.0
008 131018t2011 pau f 001 0 eng d
020 _a9781605113920 hbk.
039 9 _a201905061531
_bAUTHORITY
_c201410011056
_dsafura
_c201410011055
_dsafura
_y201310181228
_zida
040 _aUMP
090 _aTK7875 .S96 2011
111 2 _aSymposium TT, "Microelectromechanical Systems--Materials and Devices V" œd (2011 :
_cBoston, Mass.)
245 1 0 _aMEMS, bioMEMS and bioelectronics--materials and devices :
_bsymposium held November 28-December 2, 2011, Boston, Massachusetts, U.S.A. /
_ceditors, Tim Albrecht ... [et al.].
260 _aWarrendale, Pa. :
_bMaterials Research Society,
_c2012
300 _ax, 221 p. :
_bill ;
_c24 cm.
490 0 _aMRS proceedings,
_x1946-4274 ;
_vv. 1415
500 _aContains proceedings of Symposia TT, II, and HH of the 2011 MRS Fall Meeting, held Nov. 28-Dec. 2, 2011, in Boston, Mass
504 _aIncludes bibliographical references and indexes
650 0 _aMicroelectromechanical systems
_vCongresses
650 0 _aBiotechnology
_vCongresses
650 0 _aBioelectronics
_xCongresses
700 1 _aAlbrecht, Tim.
999 _aVIRTUA40
_c68915
_d68921
999 _aVTLSSORT0080*0200*0400*0900*1110*2450*2600*3000*4900*5000*5040*6500*6501*6502*7000*9992