| 000 | 00892nam a2200265 a 4500 | ||
|---|---|---|---|
| 001 | vtls000071534 | ||
| 003 | KUKTEM | ||
| 005 | 20251125095348.0 | ||
| 008 | 130612t2013 nyua f b 001 0 eng d | ||
| 020 | _a9781441999849 | ||
| 020 | _a1441999841 | ||
| 039 | 9 |
_a201402201155 _bjamie _c201402201155 _djamie _y201306121439 _zida |
|
| 040 | _aUMP | ||
| 090 | _aTK7875 .A38 2013 | ||
| 245 | 0 | 0 |
_aAdvanced mechatronics and MEMS devices / _ceditor by Dan Zhang |
| 260 |
_aNew York : _bSpringer, _cc2013 |
||
| 300 |
_axi, 249 p. : _bill. (some col.) ; _c24 cm. |
||
| 490 | 1 |
_aMicrosystems ; _v23 |
|
| 504 | _aIncludes bibliographical references and index | ||
| 650 | 0 | _aMicroelectromechanical systems | |
| 650 | 0 | _aMechatronics | |
| 700 | 1 | _aZhang, Dan | |
| 830 | 0 |
_aMicrosystems ; _v23 |
|
| 999 |
_aVIRTUA40 _c70639 _d70645 |
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| 999 | _aVTLSSORT0080*0200*0201*0400*0900*2450*2600*3000*4900*5040*6500*6501*7000*8300*9992 | ||