| 000 | 01525nam a2200301 a 4500 | ||
|---|---|---|---|
| 001 | vtls000071789 | ||
| 003 | KUKTEM | ||
| 005 | 20251125095410.0 | ||
| 008 | 130613t2011 sz a f 001 0 eng d | ||
| 020 | _a9783037850510 (pbk.) | ||
| 039 | 9 |
_a201401280952 _bsaini _y201306131609 _zfaiz |
|
| 040 | _aUMP | ||
| 090 | _aTK7874.84 .T43 2011 | ||
| 111 | 2 |
_aInternational Symposium on Technology Evolution for Silicon Nano-Electronics _d(2010 : _cTokyo Institute of Technology) |
|
| 245 | 1 | 0 |
_aTechnology evolution for silicon nano-electronics : _bselected, peer reviewed papers from the proceedings of the International Symposium on Technology Evolution for Silicon Nano-Electronics 2010, June 3-5, 2010, Tokyo Institute of Technology, Tokyo, Japan / _cedited by Seiichi Miyazaki and Hitoshi Tabata |
| 246 | 3 | _aProceedings of the International Symposium on Technology Evolution for Silicon Nano-Electronics | |
| 260 |
_aStafa-Zurich, Switzerland : _bTrans Tech, _c2011 |
||
| 300 |
_axi, 234 p. : _bill. ; _c25 cm. |
||
| 490 | 1 |
_aKey engineering materials, _x1013-9826 ; _vv. 470 |
|
| 504 | _aIncludes bibliographical references and index | ||
| 650 | 0 |
_aNanoelectronics _vCongresses |
|
| 650 | 0 |
_aNanostructured materials _vCongresses |
|
| 650 | 0 |
_aMetal oxide semiconductors _vCongresses |
|
| 700 | 1 | _aMiyazaki, Seiichi | |
| 700 | 1 | _aTabata, Hitoshi | |
| 830 | 0 |
_aKey engineering materials ; _vv. 470 |
|
| 999 |
_aVIRTUA40 _c70965 _d70971 |
||
| 999 | _aVTLSSORT0080*0200*0400*0900*1110*2450*2460*2600*3000*4900*5040*6500*6501*6502*7000*7001*8300*9992 | ||