| 000 | 01267nam a2200277 a 4500 | ||
|---|---|---|---|
| 001 | vtls000071786 | ||
| 003 | KUKTEM | ||
| 005 | 20251125095410.0 | ||
| 008 | 130613t2011 sz a f 001 0 eng d | ||
| 020 | _a9783037851456 (pbk.) | ||
| 039 | 9 |
_a201401281005 _bsaini _y201306131607 _zfaiz |
|
| 040 | _aUMP | ||
| 090 | _aTK7875 .M384 2011 | ||
| 111 | 2 |
_aInternational Conference on Materials for Advanced Technologies _d(2011 : _cSingapore) |
|
| 245 | 1 | 0 |
_aNEMS/MEMS technology and devices : _bselected, peer reviewed papers from the International conference on materials for advanced technologies (ICMAT 2011), Symposium G, June 26 - July 1, 2011, Suntec, Singapore / _cedited by Lynn Khine and Julius M. Tsai |
| 260 |
_aDurnten-Zurich : _bTrans Tech, _c2011 |
||
| 300 |
_ax, 229 p. : _bill. ; _c25 cm. |
||
| 490 | 1 |
_aAdvanced materials research, _x1022-6680 ; _vv. 254 |
|
| 504 | _aIncludes bibliographical references and index | ||
| 650 | 0 |
_aNanoelectromechanical systems _vCongresses |
|
| 650 | 0 |
_aMicroelectromechanical systems _vCongresses |
|
| 700 | 1 | _aKhine, Lynn | |
| 700 | 1 | _aTsai, Julius M. | |
| 830 | 0 |
_aAdvanced materials research ; _vv. 254 |
|
| 999 |
_aVIRTUA40 _c70966 _d70972 |
||
| 999 | _aVTLSSORT0080*0200*0400*0900*1110*2450*2600*3000*4900*5040*6500*6501*7000*7001*8300*9992 | ||