| 000 | 01573nam a2200325 a 4500 | ||
|---|---|---|---|
| 001 | vtls000061969 | ||
| 003 | KUKTEM | ||
| 005 | 20251125095417.0 | ||
| 008 | 120615t2002 paua f 001 0 eng d | ||
| 020 | _a9781558996229 (hbk.) | ||
| 039 | 9 |
_a201404231145 _bsaini _y201206151023 _zsafura |
|
| 040 | _aUMP | ||
| 090 | _aTK7871.15.S55 M38 2002 | ||
| 111 | 2 |
_aSymposium A, "Materials Issues in Novel Si-Based Technology _d(2001 : _cBoston, Mass.) |
|
| 245 | 1 | 0 |
_aMaterials issues in novel Si-based technology : _bsymposium held November 26-28, 2001, Boston, Massachusetts, U.S.A. / _ceditors, William G. En ... [et al.] |
| 260 |
_aWarrendale, PA : _bMaterials Research Society, _c2002 |
||
| 300 |
_axi, 280 p. : _bill. ; _c24 cm. |
||
| 490 | 1 |
_aMaterials Research Society symposium proceedings ; _vv. 686 |
|
| 500 | _a"Papers presented at Symposium A, "Materials Issues in Novel Si-Based Technology," held ... at the 2001 MRS Fall Meeting"--P. xi | ||
| 504 | _aIncludes bibliographical references and index | ||
| 650 | 0 |
_aSilicon _xOptical properties _vCongresses |
|
| 650 | 0 |
_aSemiconductors _xMaterials _vCongresses |
|
| 650 | 0 |
_aIntegrated circuits _xMaterials _vCongresses |
|
| 650 | 0 |
_aLogic circuits _vCongresses |
|
| 650 | 0 |
_aDielectrics _vCongresses |
|
| 700 | 1 | _aEn, William G. | |
| 710 | 2 |
_aMaterials Research Society. _bMeeting _d(2001 : _cBoston, Mass.) |
|
| 830 | 0 |
_aMaterials Research Society symposium proceedings ; _vv. 686 |
|
| 999 |
_aVIRTUA40 _c71073 _d71079 |
||
| 999 | _aVTLSSORT0080*0200*0400*0900*1110*2450*2600*3000*4900*5000*5040*6500*6501*6502*6503*6504*7000*7100*8300*9992 | ||