000 00911nam a2200253 a 4500
001 vtls000077307
003 KUKTEM
005 20251125095427.0
008 140407t2013 flua f 001 0 eng d
020 _a9781466515819 (hbk.)
039 9 _a201502061622
_baida
_y201404071455
_zdilla
040 _aUMP
090 _aTK7875 .M46 2013
245 0 0 _aMEMS :
_bfundamental technology and applications /
_cedited by Vikas Choudhary, Krzysztof Iniewski
260 _aBoca Raton, FL :
_bCRC Press,
_cc2013
300 _axxii, 456 p. :
_bill. ;
_c26 cm.
490 0 _aDevices, circuits, and systems
504 _aIncludes bibliographical references and index
650 0 _aMicroelectromechanical systems
650 0 _aMicroelectronic packaging
700 1 _aChoudhary, Vikas
700 1 _aIniewski, Krzysztof
999 _aVIRTUA40
_c71251
_d71257
999 _aVTLSSORT0080*0200*0400*0900*2450*2600*3000*4900*5040*6500*6501*7000*7001*9992