| 000 | 01205nam a2200289 a 4500 | ||
|---|---|---|---|
| 001 | vtls000070724 | ||
| 003 | KUKTEM | ||
| 005 | 20251125095528.0 | ||
| 008 | 130605t2013 nyua f 001 0 eng d | ||
| 020 | _a9781461444718 | ||
| 039 | 9 |
_a201402201411 _bsaini _y201306051449 _zirma |
|
| 040 | _aUMP | ||
| 090 | _aTK7871.85 .M66 2013 | ||
| 100 | 1 | _aMönch, Lars | |
| 245 | 1 | 0 |
_aProduction planning and control for semiconductor wafer fabrication facilities : _bmodeling, analysis, and systems / _cLars Mönch, John W. Fowler, Scott J. Mason |
| 260 |
_aNew York : _bSpringer, _cc2013 |
||
| 300 |
_axii, 288 p. : _bill. (some col.) ; _c24 cm. |
||
| 490 | 1 |
_aOperations research/computer science interfaces series ; _vvol. 52 |
|
| 504 | _aIncludes bibliographical references and index | ||
| 650 | 0 |
_aSemiconductors _xDesign and construction |
|
| 650 | 0 |
_aSemiconductor wafers _xDesign and construction |
|
| 650 | 0 | _aProduction planning | |
| 700 | 1 |
_aFowler, J. W. _q(John W.) |
|
| 700 | 1 | _aMason, Scott J. | |
| 830 | 0 |
_aOperations research/computer science interfaces series ; _vvol. 52 |
|
| 999 |
_aVIRTUA40 _c72268 _d72274 |
||
| 999 | _aVTLSSORT0080*0200*0400*0900*1000*2450*2600*3000*4900*5040*6500*6501*6502*7000*7001*8300*9992 | ||