000			01397nam a2200325 a 4500
001			vtls000046986
003			KUKTEM
005			20251125095529.0
008			100705t2012 flua f 001 0 eng d
020			_a9781420055115 (v.1)
020			_a1420055119 (v.1)
020			_a9781420055191 (v.2)
020			_a1420055194 (v.2)
020			_a9781420055160 (v.3)
020			_a142005516X (v.3)
039		9	_a201412041503 _bzairi _c201404221541 _djamie _c201404221538 _djamie _c201107132332 _dVLOAD _y201007051656 _zshikin
040			_aUMP
090			_aTK7875 .M33 2012 f
100	1		_aMadou, Marc J.
245	1	0	_aFundamentals of microfabrication and nanotechnology / _cMarc J. Madou
250			_a3rd ed.
260			_aBoca Raton, FL : _bCRC Press, _cc2012
300			_a3 v. : _bill. (some col.) ; _c29 cm.
504			_aIncludes bibliographical references and index
505	0		_aV. 1. Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology -- v. 2. Manufacturing techniques for microfabrication and nanotechnology -- v. 3. From MEMS to Bio-MEMS and Bio-Nems, Manufacturaing techniques and applications
650		0	_aMicroelectromechanical systems
650		0	_aNanoelectromechanical systems
650		0	_aMicrofluidics
999			_aVIRTUA40 _c72297 _d72303
999			_aVTLSSORT0080*0200*0201*0202*0203*0204*0205*0400*0900*1000*2450*2500*2600*3000*5040*5050*6500*6501*6502*9992