000 00907nam a2200265 a 4500
001 vtls000077515
003 KUKTEM
005 20251125095549.0
008 140409t2013 gw a f 001 0 eng d
020 _a9783642369346
039 9 _a201504091024
_bsaini
_y201404091105
_zirma
040 _aUMP
090 _aTJ1075 .S56 2013
245 0 0 _aNano-tribology and materials in MEMS /
_cSujeet K. Sinha, N. Satyanarayana, Seh Chun Lim, editors
260 _aBerlin :
_bSpringer,
_c2013
300 _aviii, 275 p. :
_bill. (some col.) ;
_c24 cm.
504 _aIncludes bibliographical references and index
650 0 _aTribology
650 0 _aMicroelectromechanical systems
650 0 _aNanotechnology
700 1 _aSinha, Sujeet K.
700 1 _aSatyanarayana, N.
700 1 _aLim, Seh Chun
999 _aVIRTUA40
_c72622
_d72628
999 _aVTLSSORT0080*0200*0400*0900*2450*2600*3000*5040*6500*6501*6502*7000*7001*7002*9992