| 000 | 01021nam a2200265 a 4500 | ||
|---|---|---|---|
| 001 | vtls000079350 | ||
| 003 | KUKTEM | ||
| 005 | 20251125095556.0 | ||
| 008 | 140603t2013 ne a f 001 0 eng d | ||
| 020 | _a9781437778793 (hbk. : v. 6) | ||
| 039 | 9 |
_a201409261017 _bsaini _y201406031010 _znadia |
|
| 040 | _aUMP | ||
| 090 | _aTA418.7 .D48 2013 | ||
| 245 | 0 | 0 |
_aDevelopments in surface contamination and cleaning : _bmethods of cleaning and cleanliness verification / _cedited by Rajiv Kohli and K.L. Mittal |
| 260 |
_aAmsterdam : _bWilliam Andrew, _c2013 |
||
| 300 |
_axiii, 188 p. : _bill. (some col.) ; _c23 cm. |
||
| 504 | _aIncludes bibliographical references and index | ||
| 650 | 0 |
_aSurfaces (Technology) _xInspection |
|
| 650 | 0 |
_aSurface contamination _xPrevention |
|
| 650 | 0 |
_aParticles _xMeasurement |
|
| 650 | 0 | _aDust control | |
| 700 | 1 |
_aKohli, Rajiv, _d1947- |
|
| 700 | 1 |
_aMittal, K. L., _d1945- |
|
| 999 |
_aVIRTUA40 _c72728 _d72734 |
||
| 999 | _aVTLSSORT0080*0200*0400*0900*2450*2600*3000*5040*6500*6501*6502*6503*7000*7001*9992 | ||