000 01021nam a2200265 a 4500
001 vtls000079350
003 KUKTEM
005 20251125095556.0
008 140603t2013 ne a f 001 0 eng d
020 _a9781437778793 (hbk. : v. 6)
039 9 _a201409261017
_bsaini
_y201406031010
_znadia
040 _aUMP
090 _aTA418.7 .D48 2013
245 0 0 _aDevelopments in surface contamination and cleaning :
_bmethods of cleaning and cleanliness verification /
_cedited by Rajiv Kohli and K.L. Mittal
260 _aAmsterdam :
_bWilliam Andrew,
_c2013
300 _axiii, 188 p. :
_bill. (some col.) ;
_c23 cm.
504 _aIncludes bibliographical references and index
650 0 _aSurfaces (Technology)
_xInspection
650 0 _aSurface contamination
_xPrevention
650 0 _aParticles
_xMeasurement
650 0 _aDust control
700 1 _aKohli, Rajiv,
_d1947-
700 1 _aMittal, K. L.,
_d1945-
999 _aVIRTUA40
_c72728
_d72734
999 _aVTLSSORT0080*0200*0400*0900*2450*2600*3000*5040*6500*6501*6502*6503*7000*7001*9992