| 000 | 01052nam a2200253 a 4500 | ||
|---|---|---|---|
| 001 | vtls000061055 | ||
| 003 | KUKTEM | ||
| 005 | 20251125095600.0 | ||
| 008 | 120605t2006 paua g bi 001 0 eng d | ||
| 020 | _a9781558998681 | ||
| 039 | 9 |
_a201407021227 _bsafura _y201206051421 _zsafura |
|
| 040 | _aUMP | ||
| 090 | _aTK7871.85 .D67 2006 | ||
| 245 | 0 | 0 |
_aDoping engineering for device fabrication : _bsymposium held April 18-19, 2006, San Francisco, California, U.S.A. / _ceditors, B.J. Pawlak ... [et al.]. |
| 260 |
_aWarrendale, Pa. : _bMaterials Research Society, _c2006 |
||
| 300 |
_axi, 213 p. : _bill. ; _c24 cm. |
||
| 490 | 1 |
_aMaterials Research Society symposium proceedings ; _vv. 912 |
|
| 504 | _aIncludes bibliographical references and indexes | ||
| 650 | 0 |
_aSemiconductor doping _vCongresses |
|
| 650 | 0 |
_aSemiconductors _xMaterials _vCongresses |
|
| 650 | 0 |
_aSemiconductors _xDesign and construction _vCongresses |
|
| 700 | 1 | _aPawlak, B. J. | |
| 999 |
_aVIRTUA40 _c72802 _d72808 |
||
| 999 | _aVTLSSORT0080*0200*0400*0900*2450*2600*3000*4900*5040*6500*6501*6502*7000*9992 | ||