000 01052nam a2200253 a 4500
001 vtls000061055
003 KUKTEM
005 20251125095600.0
008 120605t2006 paua g bi 001 0 eng d
020 _a9781558998681
039 9 _a201407021227
_bsafura
_y201206051421
_zsafura
040 _aUMP
090 _aTK7871.85 .D67 2006
245 0 0 _aDoping engineering for device fabrication :
_bsymposium held April 18-19, 2006, San Francisco, California, U.S.A. /
_ceditors, B.J. Pawlak ... [et al.].
260 _aWarrendale, Pa. :
_bMaterials Research Society,
_c2006
300 _axi, 213 p. :
_bill. ;
_c24 cm.
490 1 _aMaterials Research Society symposium proceedings ;
_vv. 912
504 _aIncludes bibliographical references and indexes
650 0 _aSemiconductor doping
_vCongresses
650 0 _aSemiconductors
_xMaterials
_vCongresses
650 0 _aSemiconductors
_xDesign and construction
_vCongresses
700 1 _aPawlak, B. J.
999 _aVIRTUA40
_c72802
_d72808
999 _aVTLSSORT0080*0200*0400*0900*2450*2600*3000*4900*5040*6500*6501*6502*7000*9992