000 00855nam a2200241 a 4500
001 vtls000073897
003 KUKTEM
005 20251125095619.0
008 130816t2010 enka f 001 0 eng d
020 _a9780521876520 (hbk.)
039 9 _a201406121058
_bsaini
_y201308161141
_zsri
040 _aUMP
090 _aTJ211 .M38 2010
100 1 _aMathia, Karl
245 1 0 _aRobotics for electronics manufacturing :
_bprinciples and applications in cleanroom automation /
_cKarl Mathia
260 _aCambridge :
_bCambridge University Press,
_c2010
300 _axii, 238 p. :
_bill. ;
_c25 cm.
504 _aIncludes bibliographical references and index
650 0 _aRobotics
650 0 _aClean rooms
650 0 _aManufacturing processes
_xAutomation
999 _aVIRTUA40
_c73095
_d73101
999 _aVTLSSORT0080*0200*0400*0900*1000*2450*2600*3000*5040*6500*6501*6502*9992