| 000 | 00825nam a2200229 a 4500 | ||
|---|---|---|---|
| 001 | vtls000074901 | ||
| 003 | KUKTEM | ||
| 005 | 20251125095632.0 | ||
| 008 | 131001t2013 flua g bi 001 0 eng d | ||
| 020 | _a9781466509542 | ||
| 039 | 9 |
_a201406271525 _bsafura _y201310011452 _zida |
|
| 040 | _aUMP | ||
| 090 | _aT174.7 .M537 2013 | ||
| 245 | 0 | 0 |
_aMicroelectronics to nanoelectronics : _bmaterials, devices & manufacturability / _ceditor, Anupama B. Kaul |
| 260 |
_aBoca Raton, FL : _bCRC Press, _c2013 |
||
| 300 |
_axxiii, 407 p., [32] p. of plates : _bill. (some col.) ; _c24 cm. |
||
| 504 | _aIncludes bibliographical references and index | ||
| 650 | 0 | _aNanotechnology | |
| 650 | 0 | _aMicroelectronics | |
| 650 | 0 | _aNanoelectronics | |
| 999 |
_aVIRTUA40 _c73313 _d73319 |
||
| 999 | _aVTLSSORT0080*0200*0400*0900*2450*2600*3000*5040*6500*6501*6502*9992 | ||