| 000 | 00983nam a2200265 a 4500 | ||
|---|---|---|---|
| 001 | vtls000079580 | ||
| 003 | KUKTEM | ||
| 005 | 20251125095719.0 | ||
| 008 | 140604t2011 nyua f 001 0 eng d | ||
| 020 | _a9781617618376 | ||
| 039 | 9 |
_a201410131301 _bsaini _y201406041021 _znadia |
|
| 040 | _aUMP | ||
| 090 | _aTK7872.M3 L584 2011 | ||
| 245 | 0 | 0 |
_aLithography : _bprinciples, processes and materials / _cTheodore C. Hennessy, editor |
| 260 |
_aHauppauge, NY : _bNova Science Pub., _c2011 |
||
| 300 |
_axii, 284 p. : _bill. (some col.) ; _c26 cm. |
||
| 490 | 1 | _aEngineering tools, techniques and tables | |
| 490 | 0 | _aNanotechnology science and technology | |
| 504 | _aIncludes bibliographical references and index | ||
| 650 | 0 | _aMicrolithography | |
| 650 | 0 | _aMicrofabrication | |
| 700 | 1 | _aHennessy, Theodore C. | |
| 830 | 0 | _aEngineering tools, techniques and tables | |
| 999 |
_aVIRTUA40 _c74071 _d74077 |
||
| 999 | _aVTLSSORT0080*0200*0400*0900*2450*2600*3000*4900*4901*5040*6500*6501*7000*8300*9992 | ||