| 000 | 01066nam a2200289 a 4500 | ||
|---|---|---|---|
| 001 | vtls000084351 | ||
| 003 | KUKTEM | ||
| 005 | 20251125095946.0 | ||
| 008 | 141201t2013 maua f 001 0 eng d | ||
| 020 | _a9781608075270 | ||
| 039 | 9 |
_a201505151247 _bsaini _y201412011127 _ztraining1 |
|
| 040 | _aUMP | ||
| 090 | _aTK7875 .C67 2013 | ||
| 100 | 1 | _aCostello, Suzanne | |
| 245 | 1 | 0 |
_aHermeticity testing of MEMS and microelectronic packages / _cSuzanne Costello, Marc P.Y. Desmulliez |
| 260 |
_aBoston, MA : _bArtech House, _c2013 |
||
| 300 |
_a195 p. : _bill. ; _c24 cm. |
||
| 490 | 1 | _aIntegrated microsystems series | |
| 504 | _aIncludes bibliographical references and index | ||
| 650 | 0 | _aMicroelectromechanical systems | |
| 650 | 0 | _aMicroelectronics | |
| 650 | 0 |
_aMicroelectromechanical systems _xTesting |
|
| 650 | 0 |
_aMicroelectronics _xTesting |
|
| 700 | 1 |
_aDesmulliez, Marc P. Y., _d1963- |
|
| 830 | 0 | _aIntegrated microsystems series | |
| 999 |
_aVIRTUA40 _c76247 _d76253 |
||
| 999 | _aVTLSSORT0080*0200*0400*0900*1000*2450*2600*3000*4900*5040*6500*6501*6502*6503*7000*8300*9992 | ||