000 01066nam a2200289 a 4500
001 vtls000084351
003 KUKTEM
005 20251125095946.0
008 141201t2013 maua f 001 0 eng d
020 _a9781608075270
039 9 _a201505151247
_bsaini
_y201412011127
_ztraining1
040 _aUMP
090 _aTK7875 .C67 2013
100 1 _aCostello, Suzanne
245 1 0 _aHermeticity testing of MEMS and microelectronic packages /
_cSuzanne Costello, Marc P.Y. Desmulliez
260 _aBoston, MA :
_bArtech House,
_c2013
300 _a195 p. :
_bill. ;
_c24 cm.
490 1 _aIntegrated microsystems series
504 _aIncludes bibliographical references and index
650 0 _aMicroelectromechanical systems
650 0 _aMicroelectronics
650 0 _aMicroelectromechanical systems
_xTesting
650 0 _aMicroelectronics
_xTesting
700 1 _aDesmulliez, Marc P. Y.,
_d1963-
830 0 _aIntegrated microsystems series
999 _aVIRTUA40
_c76247
_d76253
999 _aVTLSSORT0080*0200*0400*0900*1000*2450*2600*3000*4900*5040*6500*6501*6502*6503*7000*8300*9992