000 00922nam a2200277 a 4500
001 vtls000086528
003 KUKTEM
005 20251125100157.0
008 150518t2015 maua f 001 0 eng d
020 _a9780323311496
039 9 _a201511191203
_btraining1
_y201505181642
_zezzatul
040 _aUMP
090 _aTS176 .M53 2015
245 1 0 _aMicromanufacturing engineering and technology /
_cedited by Yi Qin
250 _a2nd ed.
260 _aWaltham, MA :
_bWilliam Andrew,
_c2015
300 _axliv, 814 p. :
_bill. ;
_c24 cm.
490 0 _aMicro & nano technologies series
504 _aIncludes bibliographical references and index
650 0 _aManufactures
650 0 _aManufacturing processes
650 0 _aProduction engineering
650 0 _aMicrotechnology
700 1 _aQin, Yi
999 _aVIRTUA40
_c78222
_d78228
999 _aVTLSSORT0080*0200*0400*0900*2450*2500*2600*3000*4900*5040*6500*6501*6502*6503*7000*9992