| 000 | 00840nam a2200241 a 4500 | ||
|---|---|---|---|
| 001 | vtls000087476 | ||
| 003 | KUKTEM | ||
| 005 | 20251125100353.0 | ||
| 008 | 150601t2015 xxka f bi 001 0 eng d | ||
| 020 | _a9781781547007 | ||
| 039 | 9 |
_a201508191531 _basma _y201506011532 _zezzatul |
|
| 040 | _aUMP | ||
| 090 | _aTS183 .F86 2015 | ||
| 245 | 1 | 0 |
_aFundamentals techniques in microfabrication and nanotechnology / _ccontributors, Guomin Jiang |
| 260 |
_aUnited Kingdom : _bAuris Reference, _c2015 |
||
| 300 |
_axi, 286 p. : _bill. (some col.) ; _c24 cm. |
||
| 504 | _aIncludes bibliographical references and index | ||
| 650 | 0 | _aManufacturing processes | |
| 650 | 0 | _aMicrofabrication | |
| 650 | 0 | _aNanotechnology | |
| 700 | 1 | _aJiang, Guomin | |
| 999 |
_aVIRTUA40 _c79923 _d79929 |
||
| 999 | _aVTLSSORT0080*0200*0400*0900*2450*2600*3000*5040*6500*6501*6502*7000*9992 | ||