| 000 | 00915nam a2200241 a 4500 | ||
|---|---|---|---|
| 001 | vtls000087490 | ||
| 003 | KUKTEM | ||
| 005 | 20251125102831.0 | ||
| 008 | 150601t2015 xxka f 001 0 eng d | ||
| 020 | _a9781781547014 (hbk.) | ||
| 039 | 9 |
_a201508241156 _bsaini _y201506011634 _zezzatul |
|
| 040 | _aUMP | ||
| 090 | _aTS183 .M53 2015 | ||
| 245 | 0 | 0 |
_aMicrofabrication for industrial applications / _ccontributors, Andres Garcia ... (et al.) ; edited and compiled by Auris Reference Editorial Board |
| 260 |
_aLondon, UK : _bAuris Reference, _c2015 |
||
| 300 |
_aix, 254 p. : _bill. (some col.) ; _c24 cm. |
||
| 504 | _aIncludes bibliographical references and index | ||
| 650 | 0 | _aManufacturing processes | |
| 650 | 0 | _aMicrofabrication | |
| 700 | 1 | _aGarcia, Andres | |
| 710 | 2 | _aAuris Reference Editorial Board | |
| 999 |
_aVIRTUA40 _c80017 _d80023 |
||
| 999 | _aVTLSSORT0080*0200*0400*0900*2450*2600*3000*5040*6500*6501*7000*7100*9992 | ||