| 000 | 00916nam a2200253 a 4500 | ||
|---|---|---|---|
| 001 | vtls000093165 | ||
| 003 | KUKTEM | ||
| 005 | 20251125102911.0 | ||
| 008 | 151212t2016 flua f 001 0 eng d | ||
| 020 | _a9781498711753 | ||
| 039 | 9 |
_a201602231636 _bzul _c201602181533 _dzul _y201512121234 _zesuadi |
|
| 040 | _aUMP | ||
| 090 | _aTA418 .Y36 2016 | ||
| 100 | 1 | _aYamada, Isao | |
| 245 | 1 | 0 |
_aMaterials processing by cluster ion beams : _bhistory, technology, and applications / _cIsao Yamada |
| 260 |
_aBoca Raton, FL : _bCRC Press , _c2015 |
||
| 300 |
_axv, 244 p. : _bill. ; _c24 cm. |
||
| 504 | _aIncludes bibliographical references and index | ||
| 650 | 0 |
_aMaterials _xEffect of radiation on |
|
| 650 | 0 | _aIon bombardment | |
| 650 | 0 | _aNanostructured materials | |
| 650 | 0 |
_aSilicon _xEffect of radiation on |
|
| 999 |
_aVIRTUA40 _c80600 _d80606 |
||
| 999 | _aVTLSSORT0080*0200*0400*0900*1000*2450*2600*3000*5040*6500*6501*6502*6503*9992 | ||