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008 150417t2013 waua f 001 0 eng d
020 _a9780819496690
020 _a0819496693
039 9 _a201509031539
_basma
_y201504171604
_zezzatul
040 _aUMP
090 _aT174.7 .I57 2013
245 0 0 _aInstrumentation, metrology, and standards for nanomanufacturing, optics, and semiconductors VII :
_b28 August, San Diego, California, United States /
_cMichael T. Postek, Ndubuisi G. Orji, editors
260 _aBellingham, Washington :
_bSPIE,
_c2013
300 _a1 v. (various pagings) :
_bill. ;
_c28 cm.
490 0 _aProceedings of SPIE,
_x0277-786X ;
_vv. 8819
504 _aIncludes bibliographical references and index
650 0 _aNanostructured materials
_vCongresses
650 0 _aMicrofabrication
_vCongresses
650 0 _aNanotechnology
_vCongresses
700 1 _aPostek, Michael T.
700 1 _aOrji, Ndubuisi George
830 1 _aProceedings of SPIE,
_x0277-786X ;
_vv. 8819
999 _aVIRTUA40
_c80656
_d80662
999 _aVTLSSORT0080*0200*0201*0400*0900*2450*2600*3000*4900*5040*6500*6501*6502*7000*7001*8300*9992