| 000 | 01185nam a2200289 4500 | ||
|---|---|---|---|
| 001 | vtls000085950 | ||
| 003 | KUKTEM | ||
| 005 | 20251125102917.0 | ||
| 008 | 150417t2013 waua f 001 0 eng d | ||
| 020 | _a9780819496690 | ||
| 020 | _a0819496693 | ||
| 039 | 9 |
_a201509031539 _basma _y201504171604 _zezzatul |
|
| 040 | _aUMP | ||
| 090 | _aT174.7 .I57 2013 | ||
| 245 | 0 | 0 |
_aInstrumentation, metrology, and standards for nanomanufacturing, optics, and semiconductors VII : _b28 August, San Diego, California, United States / _cMichael T. Postek, Ndubuisi G. Orji, editors |
| 260 |
_aBellingham, Washington : _bSPIE, _c2013 |
||
| 300 |
_a1 v. (various pagings) : _bill. ; _c28 cm. |
||
| 490 | 0 |
_aProceedings of SPIE, _x0277-786X ; _vv. 8819 |
|
| 504 | _aIncludes bibliographical references and index | ||
| 650 | 0 |
_aNanostructured materials _vCongresses |
|
| 650 | 0 |
_aMicrofabrication _vCongresses |
|
| 650 | 0 |
_aNanotechnology _vCongresses |
|
| 700 | 1 | _aPostek, Michael T. | |
| 700 | 1 | _aOrji, Ndubuisi George | |
| 830 | 1 |
_aProceedings of SPIE, _x0277-786X ; _vv. 8819 |
|
| 999 |
_aVIRTUA40 _c80656 _d80662 |
||
| 999 | _aVTLSSORT0080*0200*0201*0400*0900*2450*2600*3000*4900*5040*6500*6501*6502*7000*7001*8300*9992 | ||