000 01306nam a2200253 a 4500
001 vtls000092597
003 KUKTEM
005 20251125102937.0
008 151203t2014 si a f 001 0 eng d
020 _a9789814411066 (hbk.)
039 9 _a201602041017
_bsaini
_y201512031101
_zazli
040 _aUMP
090 _aTK7875 .L39 2014
100 1 _aLawes, Ronald A.
245 1 0 _aMEMS cost analysis :
_bfrom laboratory to industry /
_cRon Lawes
246 3 _aMicroelectromechanical systems cost analysis
260 _aSingapore :
_bPan Stanford,
_c2014
300 _axvi, 289 p. :
_bill. ;
_c24 cm.
504 _aIncludes bibliographical references and index
505 0 _a1. The world of MEMS -- 2. Basic fabrication processes -- 3. Surface micromachining -- 4. High-aspect-ratio micromachining -- 5. MEMS testing -- 6. MEMS packaging -- 7. Clean rooms, buildings and plant -- 8. The MEMSCOST spreadsheet -- 9. Product costs : accelerometers -- 10. Product costs : microphones -- 11. MEMS foundries -- 12. Financial reporting and analysis -- 13. Conclusions
650 0 _aMicroelectromechanical systems
_xDesign and construction
_xCosts
650 0 _aMicroelectromechanical systems industry
_xCosts
999 _aVIRTUA40
_c80949
_d80955
999 _aVTLSSORT0080*0200*0400*0900*1000*2450*2460*2600*3000*5040*5050*6500*6501*9992