000 01142nam a2200265 a 4500
001 vtls000086898
003 KUKTEM
005 20251125103102.0
008 150521t2014 xxka f 001 0 eng d
020 _a9780857095022 (hbk.)
039 9 _a201601281636
_baida
_y201505211259
_zezzatul
040 _aUMP
090 _aTA165 .S63 2014
245 0 0 _aSmart sensors and MEMS :
_bintelligent devices and microsystems for industrial applications /
_cedited by Stoyan Nihtianov and Antonio Luque
260 _aOxford, UK :
_bWoodhead Publishing,
_c2014
300 _axxii, 538 p. :
_bill. ;
_c24 cm.
490 1 _aWoodhead Publishing series in electronic and optical materials,
_x2050-1501 ;
_vv. 51
504 _aIncludes bibliographical references and index
650 0 _aDetectors
_xIndustrial applications
650 0 _aMicroelectromechanical systems
_xIndustrial applications
700 1 _aNihtianov, Stoyan
700 1 _aLuque, A.
830 0 _aWoodhead Publishing series in electronic and optical materials,
_x2050-1501 ;
_vv. 51
999 _aVIRTUA40
_c82081
_d82087
999 _aVTLSSORT0080*0200*0400*0900*2450*2600*3000*4900*5040*6500*6501*7000*7001*8300*9992